a) CCVD
b) PECVD
c) LPCVD
d) ALCVD
Answer: a
Explanation: CCVD (Combustion Chemical Vapor Deposition) is a flame based technique. In this, the metal-bearing chemicals are first dissolved in a solution that typically is a combustible fuel. The solution is then atomized to form microscopic droplets that are carried by an O2 stream to the flame where they are combusted. The heat from the flame provides the energy required to vaporize the droplets and for the precursors to react and deposit on the substrate.
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